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Critical aspects of substrate nanopatterning for the ordered growth of GaN nanocolumns

Precise and reproducible surface nanopatterning is the key for a successful ordered growth of GaN nanocolumns. In this work, we point out the main technological issues related to the patterning process, mainly surface roughness and cleaning, and mask adhesion to the substrate. We found that each of...

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Detalhes bibliográficos
Main Authors: Barbagini, Francesca, Bengoechea-Encabo, Ana, Albert, Steven, Martinez, Javier, Sanchez García, Miguel Angel, Trampert, Achim, Calleja, Enrique
Formato: Artigo
Idioma:Inglês
Publicado em: Springer 2011
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC3264675/
https://ncbi.nlm.nih.gov/pubmed/22168918
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-6-632
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