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Scanned Probe Oxidation onp-GaAs(100) Surface with an Atomic Force Microscopy

Locally anodic oxidation has been performed to fabricate the nanoscale oxide structures onp-GaAs(100) surface, by using an atomic force microscopy (AFM) with the conventional and carbon nanotube (CNT)-attached probes. The results can be utilized to fabricate the oxide nanodots under ambient conditio...

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Bibliografske podrobnosti
Main Authors: Jian, Sheng-Rui, Juang, Jenh-Yih
Format: Artigo
Jezik:Inglês
Izdano: Springer 2008
Teme:
Online dostop:https://ncbi.nlm.nih.gov/pmc/articles/PMC3244860/
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1007/s11671-008-9144-2
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