Self-seeded, position-controlled InAs nanowire growth on Si: A growth parameter study

In this work, the nucleation and growth of InAs nanowires on patterned SiO(2)/Si(111) substrates is studied. It is found that the nanowire yield is strongly dependent on the size of the etched holes in the SiO(2), where openings smaller than 180 nm lead to a substantial decrease in nucleation yield,...

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Bibliographic Details
Main Authors: Mandl, Bernhard, Dey, Anil W., Stangl, Julian, Cantoro, Mirco, Wernersson, Lars-Erik, Bauer, Günther, Samuelson, Lars, Deppert, Knut, Thelander, Claes
Format: Artigo
Language:Inglês
Published: North-Holland Pub. Co 2011
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Article
Online Access:https://ncbi.nlm.nih.gov/pmc/articles/PMC3191268/
https://ncbi.nlm.nih.gov/pubmed/22053114
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1016/j.jcrysgro.2011.08.023
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