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Berkovich Nanoindentation on AlN Thin Films
Berkovich nanoindentation-induced mechanical deformation mechanisms of AlN thin films have been investigated by using atomic force microscopy (AFM) and cross-sectional transmission electron microscopy (XTEM) techniques. AlN thin films are deposited on the metal-organic chemical-vapor deposition (MOC...
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| Main Authors: | , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer
2010
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2894076/ https://ncbi.nlm.nih.gov/pubmed/20672096 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1007/s11671-010-9582-5 |
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