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Dislocation Energetics and Pop-Ins in AlN Thin Films by Berkovich Nanoindentation
Nanoindentation-induced multiple pop-ins were observed in the load-displacement curves when the mechanical responses of AlN films grown on c-plane sapphire substrates were investigated by using Berkovich indenters. No evidence of phase transformation is revealed by cross-sectional transmission elect...
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| Published in: | Materials (Basel) |
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| Main Authors: | , , , |
| Format: | Artigo |
| Language: | Inglês |
| Published: |
MDPI
2013
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| Subjects: | |
| Online Access: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5452654/ https://ncbi.nlm.nih.gov/pubmed/28788330 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma6094259 |
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