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Evaluation of wafer bonded CMUTs with rectangular membranes featuring high fill factor

Increasing fill factor is one design approach used to increase average output displacement, output pressure, and sensitivity of capacitive micromachined ultrasonic transducers (CMUTs). For rectangular cells, the cell-to-cell spacing and the aspect ratio determine the fill factor. In this paper, we e...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Wong, Serena H., Kupnik, Mario, Zhuang, Xuefeng, Lin, Der-Song, Butts-Pauly, Kim, Khuri-Yakub, B.T.
Format: Artigo
Sprache:Inglês
Veröffentlicht: 2008
Schlagworte:
Online Zugang:https://ncbi.nlm.nih.gov/pmc/articles/PMC2766518/
https://ncbi.nlm.nih.gov/pubmed/18986902
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/TUFFC.897
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