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Encapsulation of Capacitive Micromachined Ultrasonic Transducers Using Viscoelastic Polymer
The packaging of a medical imaging or therapeutic ultrasound transducer should provide protective insulation while maintaining high performance. For a capacitive micromachined ultrasonic transducer (CMUT), an ideal encapsulation coating would therefore require a limited and predictable change on the...
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| Main Authors: | , , , , |
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| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
2010
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| Fag: | |
| Online adgang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3002904/ https://ncbi.nlm.nih.gov/pubmed/21170294 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/JMEMS.2010.2076786 |
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