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Encapsulation of Capacitive Micromachined Ultrasonic Transducers Using Viscoelastic Polymer

The packaging of a medical imaging or therapeutic ultrasound transducer should provide protective insulation while maintaining high performance. For a capacitive micromachined ultrasonic transducer (CMUT), an ideal encapsulation coating would therefore require a limited and predictable change on the...

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Bibliografische gegevens
Hoofdauteurs: Lin, Der-Song, Zhuang, Xuefeng, Wong, Serena H., Kupnik, Mario, Khuri-Yakub, Butrus Thomas
Formaat: Artigo
Taal:Inglês
Gepubliceerd in: 2010
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Online toegang:https://ncbi.nlm.nih.gov/pmc/articles/PMC3002904/
https://ncbi.nlm.nih.gov/pubmed/21170294
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/JMEMS.2010.2076786
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