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Singulation for imaging ring arrays of capacitive micromachined ultrasonic transducers
Singulation of MEMS is a critical step in the transition from wafer-level to die-level devices. As is the case for capacitive micromachined ultrasound transducer (CMUT) ring arrays, an ideal singulation must protect the fragile membranes from the processing environment while maintaining a ring array...
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| 出版年: | J Micromech Microeng |
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| 主要な著者: | , , , , , , |
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
2014
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| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4827715/ https://ncbi.nlm.nih.gov/pubmed/27076702 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/0960-1317/24/10/107002 |
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