Singulation for imaging ring arrays of capacitive micromachined ultrasonic transducers

Autor Chang, Chienliu, Moini, Azadeh, Nikoozadeh, Amin, Sarioglu, Ali Fatih, Apte, Nikhil, Zhuang, Xuefeng, Khuri-Yakub, Butrus T
Vydáno v J Micromech Microeng (2014)