Surface Analysis of Photolithographic Patterns using ToF-SIMS and PCA

Time-of-flight secondary ion mass spectrometry (ToF-SIMS) is a surface analysis technique well-suited to detect and identify trace surface species. With the latest analyzers, ion sources and data analysis methods, imaging ToF-SIMS provides detailed 2-D and 3-D surface reactivity maps. Coupling multi...

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Main Authors: Dubey, Manish, Emoto, Kazunori, Cheng, Fang, Gamble, Lara J., Takahashi, Hironobu, Grainger, David W., Castner, David G.
Format: Artigo
Jezik:Inglês
Izdano: 2009
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Article
Online dostop:https://ncbi.nlm.nih.gov/pmc/articles/PMC2743017/
https://ncbi.nlm.nih.gov/pubmed/19756241
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1002/sia.3056
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