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Surface Analysis of Photolithographic Patterns using ToF-SIMS and PCA
Time-of-flight secondary ion mass spectrometry (ToF-SIMS) is a surface analysis technique well-suited to detect and identify trace surface species. With the latest analyzers, ion sources and data analysis methods, imaging ToF-SIMS provides detailed 2-D and 3-D surface reactivity maps. Coupling multi...
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| Main Authors: | , , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2009
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2743017/ https://ncbi.nlm.nih.gov/pubmed/19756241 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1002/sia.3056 |
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