ロード中...
Surface Analysis of Photolithographic Patterns using ToF-SIMS and PCA
Time-of-flight secondary ion mass spectrometry (ToF-SIMS) is a surface analysis technique well-suited to detect and identify trace surface species. With the latest analyzers, ion sources and data analysis methods, imaging ToF-SIMS provides detailed 2-D and 3-D surface reactivity maps. Coupling multi...
保存先:
| 主要な著者: | , , , , , , |
|---|---|
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
2009
|
| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2743017/ https://ncbi.nlm.nih.gov/pubmed/19756241 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1002/sia.3056 |
| タグ: |
タグ追加
タグなし, このレコードへの初めてのタグを付けませんか!
|