Design and Analysis of a High-Gain and Robust Multi-DOF Electro-thermally Actuated MEMS Gyroscope

This paper presents the design and analysis of a multi degree of freedom (DOF) electro-thermally actuated non-resonant MEMS gyroscope with a 3-DOF drive mode and 1-DOF sense mode system. The 3-DOF drive mode system consists of three masses coupled together using suspension beams. The 1-DOF system co...

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Bibliografski detalji
Glavni autori: Muhammad Saqib, Muhammad Mubasher Saleem, Naveed Mazhar, Saif Ullah Awan, Umar Shahbaz Khan
Format: Artigo
Jezik:Inglês
Izdano: MDPI AG 2018-11-01
Serija:Micromachines
Teme:
MEMS gyroscope
electro-thermal actuator
non-resonant
multi-DOF
high gain
capacitive sensing
robustness
Online pristup:https://www.mdpi.com/2072-666X/9/11/577
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