Microfabrication Process-Driven Design, FEM Analysis and System Modeling of 3-DoF Drive Mode and 2-DoF Sense Mode Thermally Stable Non-Resonant MEMS Gyroscope

This paper presents microfabrication process-driven design of a multi-degree of freedom (multi-DoF) non-resonant electrostatic microelectromechanical systems (MEMS) gyroscope by considering the design constraints of commercially available low-cost and widely-used silicon-on-insulator multi-user MEMS...

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Hlavní autoři: Syed Ali Raza Bukhari, Muhammad Mubasher Saleem, Umar Shahbaz Khan, Amir Hamza, Javaid Iqbal, Rana Iqtidar Shakoor
Médium: Artigo
Jazyk:Inglês
Vydáno: MDPI AG 2020-09-01
Edice:Micromachines
Témata:
MEMS gyroscope
multi-degree of freedom (multi-DoF)
non-resonant
microfabrication
thermal stability
finite element method (FEM)
On-line přístup:https://www.mdpi.com/2072-666X/11/9/862
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