Microfabrication Process-Driven Design, FEM Analysis and System Modeling of 3-DoF Drive Mode and 2-DoF Sense Mode Thermally Stable Non-Resonant MEMS Gyroscope

This paper presents microfabrication process-driven design of a multi-degree of freedom (multi-DoF) non-resonant electrostatic microelectromechanical systems (MEMS) gyroscope by considering the design constraints of commercially available low-cost and widely-used silicon-on-insulator multi-user MEMS...

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Asıl Yazarlar: Syed Ali Raza Bukhari, Muhammad Mubasher Saleem, Umar Shahbaz Khan, Amir Hamza, Javaid Iqbal, Rana Iqtidar Shakoor
Materyal Türü: Artigo
Dil:Inglês
Baskı/Yayın Bilgisi: MDPI AG 2020-09-01
Seri Bilgileri:Micromachines
Konular:
MEMS gyroscope
multi-degree of freedom (multi-DoF)
non-resonant
microfabrication
thermal stability
finite element method (FEM)
Online Erişim:https://www.mdpi.com/2072-666X/11/9/862
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