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Microfabrication Process-Driven Design, FEM Analysis and System Modeling of 3-DoF Drive Mode and 2-DoF Sense Mode Thermally Stable Non-Resonant MEMS Gyroscope
This paper presents microfabrication process-driven design of a multi-degree of freedom (multi-DoF) non-resonant electrostatic microelectromechanical systems (MEMS) gyroscope by considering the design constraints of commercially available low-cost and widely-used silicon-on-insulator multi-user MEMS...
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Hlavní autoři: | , , , , , |
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Médium: | Artigo |
Jazyk: | Inglês |
Vydáno: |
MDPI AG
2020-09-01
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Edice: | Micromachines |
Témata: | |
On-line přístup: | https://www.mdpi.com/2072-666X/11/9/862 |
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