Design and Analysis of a High-Gain and Robust Multi-DOF Electro-thermally Actuated MEMS Gyroscope

Por Muhammad Saqib, Muhammad Mubasher Saleem, Naveed Mazhar, Saif Ullah Awan, Umar Shahbaz Khan
Publicado em 2018-11-01

Microfabrication Process-Driven Design, FEM Analysis and System Modeling of 3-DoF Drive Mode and 2-DoF Sense Mode Thermally Stable Non-Resonant MEMS Gyroscope

Por Syed Ali Raza Bukhari, Muhammad Mubasher Saleem, Umar Shahbaz Khan, Amir Hamza, Javaid Iqbal, Rana Iqtidar Shakoor
Publicado em 2020-09-01