Effect of Grain-Size Control on Mechanical and Optical Properties of ZrSi₂ Membranes for Extreme Ultraviolet Pellicles

Extreme ultraviolet (EUV) pellicles must exhibit high optical transmittance, thermal, and mechanical stability to withstand the demands of semiconductor fabrication. ZrSi₂ has attracted attention as a pellicle material due to its excellent optical characteristics. The thickness of ZrSi<su...

Ausführliche Beschreibung

Bibliografische Detailangaben

Hauptverfasser:	Won Jin Kim, Seong Ju Wi, Seungchan Moon, Junho Hong, Taeho Lee, Young Wook Park, Jinho Ahn
Format:	Artigo
Sprache:	Inglês
Veröffentlicht:	MDPI AG 2026-02-01
Schriftenreihe:	Crystals
Schlagworte:	extreme ultraviolet pellicles zirconium disilicide freestanding membrane grain size mechanical property optical property
Online-Zugang:	https://www.mdpi.com/2073-4352/16/2/150
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