Effect of Grain-Size Control on Mechanical and Optical Properties of ZrSi₂ Membranes for Extreme Ultraviolet Pellicles

Extreme ultraviolet (EUV) pellicles must exhibit high optical transmittance, thermal, and mechanical stability to withstand the demands of semiconductor fabrication. ZrSi₂ has attracted attention as a pellicle material due to its excellent optical characteristics. The thickness of ZrSi<su...

Descripció completa

Dades bibliogràfiques

Autors principals:	Won Jin Kim, Seong Ju Wi, Seungchan Moon, Junho Hong, Taeho Lee, Young Wook Park, Jinho Ahn
Format:	Artigo
Idioma:	Inglês
Publicat:	MDPI AG 2026-02-01
Col·lecció:	Crystals
Matèries:	extreme ultraviolet pellicles zirconium disilicide freestanding membrane grain size mechanical property optical property
Accés en línia:	https://www.mdpi.com/2073-4352/16/2/150
Etiquetes:	Afegir etiqueta Sense etiquetes, Sigues el primer a etiquetar aquest registre!