Investigating the Degradation of EUV Transmittance of an EUV Pellicle Membrane
The extreme ultraviolet (EUV) pellicle is a freestanding membrane that protects EUV masks from particle contamination during EUV exposure. Although a high EUV transmittance of the pellicle is required to minimize the loss of throughput, the degradation of EUV transmittance during the extended exposu...
-д хадгалсан:
| Үндсэн зохиолчид: | , , , , |
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| Формат: | Artigo |
| Хэл сонгох: | Inglês |
| Хэвлэсэн: |
MDPI AG
2022-12-01
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| Цуврал: | Membranes |
| Нөхцлүүд: | |
| Онлайн хандалт: | https://www.mdpi.com/2077-0375/13/1/5 |
| Шошгууд: |
Шошго байхгүй, Энэхүү баримтыг шошголох эхний хүн болох!
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