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Investigating the Degradation of EUV Transmittance of an EUV Pellicle Membrane

The extreme ultraviolet (EUV) pellicle is a freestanding membrane that protects EUV masks from particle contamination during EUV exposure. Although a high EUV transmittance of the pellicle is required to minimize the loss of throughput, the degradation of EUV transmittance during the extended exposu...

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Principais autores: Seong Ju Wi, Yong Ju Jang, Dong Gi Lee, Seon Yong Kim, Jinho Ahn
פורמט: Artigo
שפה:Inglês
יצא לאור: MDPI AG 2022-12-01
סדרה:Membranes
נושאים:
EUV pellicle
EUV transmittance
oxidation
sputtering
microstructure
diffusion
גישה מקוונת:https://www.mdpi.com/2077-0375/13/1/5
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