Study on ZrSi₂ as a Candidate Material for Extreme Ultraviolet Pellicles

An extreme ultraviolet (EUV) pellicle is an ultrathin membrane at a stand-off distance from the reticle surface that protects the EUV mask from contamination during the exposure process. EUV pellicles must exhibit high EUV transmittance, low EUV reflectivity, and superior thermomechanical durability...

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Autors principals:	Seong Ju Wi, Won Jin Kim, Haneul Kim, Dongmin Jeong, Dong Gi Lee, Jaehyuck Choi, Sang Jin Cho, Lan Yu, Jinho Ahn
Format:	Artigo
Idioma:	Inglês
Publicat:	MDPI AG 2023-08-01
Col·lecció:	Membranes
Matèries:	EUV pellicle zirconium silicide (ZrSi<sub>2</sub>) EUV transmittance EUV reflectivity emissivity ultimate tensile strength
Accés en línia:	https://www.mdpi.com/2077-0375/13/8/731
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