Crystalline Phase-Dependent Emissivity of MoSi₂ Nanomembranes for Extreme Ultraviolet Pellicle Applications

Extreme ultraviolet (EUV) pellicles must withstand intense thermal stress during exposure due to their limited heat dissipation, which results from their ultrathin geometry and the vacuum environment within EUV scanners. To address this challenge, we investigated the crystalline phase-dependent emis...

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Главные авторы:	Haneul Kim, Young Woo Kang, Jungyeon Kim, Taeho Lee, Jinho Ahn
Формат:	Artigo
Язык:	Inglês
Опубликовано:	MDPI AG 2025-09-01
Серии:	Nanomaterials
Предметы:	extreme ultraviolet pellicle molybdenum disilicide crystal structure carrier density emissivity
Online-ссылка:	https://www.mdpi.com/2079-4991/15/19/1488
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