Detection of In-Plane Movement in Electrically Actuated Microelectromechanical Systems Using a Scanning Electron Microscope

The measurement of in-plane motion in microelectromechanical systems (MEMS) is a challenge for existing measurement techniques due to the small size of the moving devices and the low amplitude of motion. This paper studied the possibility of using images obtained using a scanning electron microscope...

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Autores principales:	Tarmo Nieminen, Nikhilendu Tiwary, Glenn Ross, Mervi Paulasto-Kröckel
Formato:	Artigo
Lenguaje:	Inglês
Publicado:	MDPI AG 2023-03-01
Colección:	Micromachines
Materias:	scanning electron microscope (SEM) motion detection MEMS in-plane motion
Acceso en línea:	https://www.mdpi.com/2072-666X/14/3/698
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