Detection of In-Plane Movement in Electrically Actuated Microelectromechanical Systems Using a Scanning Electron Microscope

The measurement of in-plane motion in microelectromechanical systems (MEMS) is a challenge for existing measurement techniques due to the small size of the moving devices and the low amplitude of motion. This paper studied the possibility of using images obtained using a scanning electron microscope...

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Bibliografische Detailangaben

Hauptverfasser:	Tarmo Nieminen, Nikhilendu Tiwary, Glenn Ross, Mervi Paulasto-Kröckel
Format:	Artigo
Sprache:	Inglês
Veröffentlicht:	MDPI AG 2023-03-01
Schriftenreihe:	Micromachines
Schlagworte:	scanning electron microscope (SEM) motion detection MEMS in-plane motion
Online-Zugang:	https://www.mdpi.com/2072-666X/14/3/698
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