Detection of In-Plane Movement in Electrically Actuated Microelectromechanical Systems Using a Scanning Electron Microscope

The measurement of in-plane motion in microelectromechanical systems (MEMS) is a challenge for existing measurement techniques due to the small size of the moving devices and the low amplitude of motion. This paper studied the possibility of using images obtained using a scanning electron microscope...

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Hlavní autoři:	Tarmo Nieminen, Nikhilendu Tiwary, Glenn Ross, Mervi Paulasto-Kröckel
Médium:	Artigo
Jazyk:	Inglês
Vydáno:	MDPI AG 2023-03-01
Edice:	Micromachines
Témata:	scanning electron microscope (SEM) motion detection MEMS in-plane motion
On-line přístup:	https://www.mdpi.com/2072-666X/14/3/698
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