Research on a MEMS Microparticles Vacuum Chamber for Optical Levitation with a Built-In Vacuum Gauge
The vacuum chamber is an important part of microparticle optical levitation technology. The traditional vacuum chamber has a large volume and many peripheral components, which cannot meet the requirements of miniaturization and on-chip optical levitation technology. Therefore, this study proposes a...
保存先:
| 主要な著者: | , , , |
|---|---|
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
MDPI AG
2022-11-01
|
| シリーズ: | Photonics |
| 主題: | |
| オンライン･アクセス: | https://www.mdpi.com/2304-6732/9/12/911 |
| タグ: |
タグなし, このレコードへの初めてのタグを付けませんか!
|