Research on a MEMS Microparticles Vacuum Chamber for Optical Levitation with a Built-In Vacuum Gauge
The vacuum chamber is an important part of microparticle optical levitation technology. The traditional vacuum chamber has a large volume and many peripheral components, which cannot meet the requirements of miniaturization and on-chip optical levitation technology. Therefore, this study proposes a...
Αποθηκεύτηκε σε:
| Κύριοι συγγραφείς: | , , , |
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| Μορφή: | Artigo |
| Γλώσσα: | Inglês |
| Έκδοση: |
MDPI AG
2022-11-01
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| Σειρά: | Photonics |
| Θέματα: | |
| Διαθέσιμο Online: | https://www.mdpi.com/2304-6732/9/12/911 |
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