Silicon-On-Nothing Micro-Pirani Gauge for Interior-Pressure Measurement
In the current work, we present a compact and cost effective Pirani gauge based on Silicon-On-Nothing (SON) technology. The proposed design uses an innovative approach of etching the sensing element directly in a crystalline silicon membrane. Such configuration allows pressure dependent heat losses...
I tiakina i:
| Ngā kaituhi matua: | , , |
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| Hōputu: | Artigo |
| Reo: | Inglês |
| I whakaputaina: |
MDPI AG
2018-11-01
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| Rangatū: | Proceedings |
| Ngā marau: | |
| Urunga tuihono: | https://www.mdpi.com/2504-3900/2/13/1079 |
| Ngā Tūtohu: |
Kāore He Tūtohu, Me noho koe te mea tuatahi ki te tūtohu i tēnei pūkete!
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