Design of a High Sensitivity Pirani Gauge Based on Vanadium Oxide Film for High Vacuum Measurement

We have designed a hot-plate-type micro-Pirani vacuum gauge with a simple structure and compatibility with conventional semiconductor fabrication processes. In the Pirani gauge, we used a vanadium oxide (VOx) membrane as the thermosensitive component, taking advantage of the high temperature coeffic...

Popoln opis

Bibliografske podrobnosti

Principais autores:	Song Guo, Liuhaodong Feng, Shuo Chen, Yucheng Ji, Xinlin Peng, Yang Xu, Yong Yin, Shinan Wang
Format:	Artigo
Jezik:	Inglês
Izdano:	MDPI AG 2022-11-01
Serija:	Sensors
Teme:	MEMS Pirani gauge vanadium oxide high TCR structure design fabrication process design simulation by COMSOL Multiphysics
Online dostop:	https://www.mdpi.com/1424-8220/22/23/9275
Oznake:	Označite Brez oznak, prvi označite!