Overview of the MEMS Pirani Sensors
Vacuum equipment has a wide range of applications, and vacuum monitoring in such equipment is necessary in order to meet practical applications. Pirani sensors work by using the effect of air density on the heat conduction of the gas to cause temperature changes in sensitive structures, thus detecti...
Gorde:
| Egile Nagusiak: | , , , , , |
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| Formatua: | Artigo |
| Hizkuntza: | Inglês |
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MDPI AG
2022-06-01
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| Saila: | Micromachines |
| Gaiak: | |
| Sarrera elektronikoa: | https://www.mdpi.com/2072-666X/13/6/945 |
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