Thickness effects on aluminum thin films
Aluminium thin films grown with different thickness on silicon substrates were analyzed by atomic force microscopy and grazing incidence x-ray techniques. Stress on surface film was found to be greater as the thickness increases because of the substrate history. Roughness measurements made on the AF...
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| 發表在: | Superficies y vacío |
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| Principais autores: | , , , , |
| 格式: | Artigo |
| 語言: | Inglês |
| 出版: |
Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
1999
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| 主題: | |
| 在線閱讀: | https://www.redalyc.org/articulo.oa?id=94200973 |
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