Thickness effects on aluminum thin films
Aluminium thin films grown with different thickness on silicon substrates were analyzed by atomic force microscopy and grazing incidence x-ray techniques. Stress on surface film was found to be greater as the thickness increases because of the substrate history. Roughness measurements made on the AF...
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| Pubblicato in: | Superficies y vacío |
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| Autori principali: | , , , , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
1999
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| Soggetti: | |
| Accesso online: | https://www.redalyc.org/articulo.oa?id=94200973 |
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