Cu4O3 thin films deposited by non-reactive rf-magnetron sputtering from a copper oxide target
Copper oxide thin films deposited by sputtering are frequently formed by using metal copper targets in reactive atmospheres. In this report, paramelaconite (Cu4O3) thin films were deposited by non-reactive rf magnetron sputtering. The target used for sputtering was a copper oxide disk fabricated by...
में बचाया:
| में प्रकाशित: | Revista Mexicana de Física |
|---|---|
| मुख्य लेखकों: | , , , , , , |
| स्वरूप: | Artigo |
| भाषा: | Inglês |
| प्रकाशित: |
Sociedad Mexicana de Física A.C.
2021
|
| विषय: | |
| ऑनलाइन पहुंच: | https://www.redalyc.org/articulo.oa?id=57082948018 |
| टैग: |
कोई टैग नहीं, इस रिकॉर्ड को टैग करने वाले पहले व्यक्ति बनें!
|
