Nalaganje...
Impact of planarized gate electrode in bottom-gate thin-film transistors
In this work, the fabrication of bottom-gate TFTs with unplanarized and planarized gate electrode are reported, as well simulations of theimpact of the gate planarization in the TFTs are presented. Previously in literature, a reduction of the contact resistance has been attributed tothis planarized...
Shranjeno v:
| izdano v: | Revista Mexicana de Física |
|---|---|
| Main Authors: | , , , , , , |
| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
Sociedad Mexicana de Física A.C.
2016
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| Teme: | |
| Online dostop: | https://www.redalyc.org/articulo.oa?id=57045452007 |
| Oznake: |
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