Wordt geladen...
Highly Ordered Amorphous Silicon-Carbon Alloys Obtained by RF PECVD
We have shown that close to stoichiometry RF PECVD amorphous silicon carbon alloys deposited under silane starving plasma conditions exhibit a tendency towards c-SiC chemical order. Motivated by this trend, we further explore the effect of increasing RF power and H2 dilution of the gaseous mixtures,...
Bewaard in:
| Gepubliceerd in: | Brazilian Journal of Physics |
|---|---|
| Hoofdauteurs: | , , , , |
| Formaat: | Artigo |
| Taal: | Inglês |
| Gepubliceerd in: |
Sociedade Brasileira de Física
2000
|
| Onderwerpen: | |
| Online toegang: | https://www.redalyc.org/articulo.oa?id=46413500009 |
| Tags: |
Voeg label toe
Geen labels, Wees de eerste die dit record labelt!
|