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A Study on Capacitive Micromachined Ultrasonic Transducer Periodic Sparse Array

Capacitive micromachined ultrasonic transducer (CMUT) is an ultrasonic transducer based on the microelectromechanical system (MEMS). CMUT elements are easily made into a high-density array, which will increase the hardware complexity. In order to reduce the number of active channels, this paper stud...

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Detalles Bibliográficos
Publicado en:Micromachines (Basel)
Main Authors: Zhang, Tian, Zhang, Wendong, Shao, Xingling, Yang, Yuhua, Wang, Zhihao, Wu, Yang, Pei, Yu
Formato: Artigo
Idioma:Inglês
Publicado: MDPI 2021
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Acceso en liña:https://ncbi.nlm.nih.gov/pmc/articles/PMC8230818/
https://ncbi.nlm.nih.gov/pubmed/34208152
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12060684
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