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Macro Modeling of V-Shaped Electro-Thermal MEMS Actuator with Human Error Factor

The V-shaped electro-thermal MEMS actuator model, with the human error factor taken into account, is presented in this paper through the cascading ANSYS simulation model and the Fuzzy mathematics calculation model. The Fuzzy mathematics calculation model introduces the human error factor into the ME...

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Bibliografski detalji
Izdano u:Micromachines (Basel)
Glavni autori: Zhang, Dongpeng, Cai, Anjiang, Zhao, Yulong, Hu, Tengjiang
Format: Artigo
Jezik:Inglês
Izdano: MDPI 2021
Teme:
Online pristup:https://ncbi.nlm.nih.gov/pmc/articles/PMC8229871/
https://ncbi.nlm.nih.gov/pubmed/34072272
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12060622
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