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The Hybrid Fabrication Process of Metal/Silicon Composite Structure for MEMS S&A Device
The micro-electromechanical system (MEMS) safety-and-arming (S&A) device has the features of integration and miniaturization, which is one of the important directions of weapon development. Confined by the fabrication process, the silicon-based devices are too fragile, and the metal-based device...
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| Publicado no: | Micromachines (Basel) |
|---|---|
| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2019
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6681024/ https://ncbi.nlm.nih.gov/pubmed/31337075 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10070469 |
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