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Research Status and Development Trend of MEMS Switches: A Review
MEMS switch is a movable device manufactured by means of semiconductor technology, possessing many incomparable advantages such as a small volume, low power consumption, high integration, etc. This paper reviews recent research of MEMS switches, pointing out the important performance indexes and sys...
में बचाया:
| में प्रकाशित: | Micromachines (Basel) |
|---|---|
| मुख्य लेखकों: | , , |
| स्वरूप: | Artigo |
| भाषा: | Inglês |
| प्रकाशित: |
MDPI
2020
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| विषय: | |
| ऑनलाइन पहुंच: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7408580/ https://ncbi.nlm.nih.gov/pubmed/32708999 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11070694 |
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