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Macro Modeling of V-Shaped Electro-Thermal MEMS Actuator with Human Error Factor

The V-shaped electro-thermal MEMS actuator model, with the human error factor taken into account, is presented in this paper through the cascading ANSYS simulation model and the Fuzzy mathematics calculation model. The Fuzzy mathematics calculation model introduces the human error factor into the ME...

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Detalhes bibliográficos
Publicado no:Micromachines (Basel)
Main Authors: Zhang, Dongpeng, Cai, Anjiang, Zhao, Yulong, Hu, Tengjiang
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2021
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC8229871/
https://ncbi.nlm.nih.gov/pubmed/34072272
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12060622
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