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Effect of Gas Annealing on the Electrical Properties of Ni/AlN/SiC

It is shown in this work that annealing of Schottky barrier diodes (SBDs) in the form of Ni/AlN/SiC heterojunction devices in an atmosphere of nitrogen and oxygen leads to a significant improvement in the electrical properties of the structures. Compared to the non-annealed device, the on/off ratio...

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Publicat a:Micromachines (Basel)
Autors principals: Kim, Dong-Hyeon, Schweitz, Michael A., Koo, Sang-Mo
Format: Artigo
Idioma:Inglês
Publicat: MDPI 2021
Matèries:
Accés en línia:https://ncbi.nlm.nih.gov/pmc/articles/PMC7998277/
https://ncbi.nlm.nih.gov/pubmed/33800338
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12030283
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