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Organoselenium Precursors for Atomic Layer Deposition
[Image: see text] Organoselenium compounds with perspective application as Se precursors for atomic layer deposition have been reviewed. The originally limited portfolio of available Se precursors such as H(2)Se and diethyl(di)selenide has recently been extended by bis(trialkylsilyl)selenides, bis(t...
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| Pubblicato in: | ACS Omega |
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| Autori principali: | , , , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
American Chemical Society
2021
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| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7970478/ https://ncbi.nlm.nih.gov/pubmed/33748567 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/acsomega.1c00223 |
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