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Organoselenium Precursors for Atomic Layer Deposition
[Image: see text] Organoselenium compounds with perspective application as Se precursors for atomic layer deposition have been reviewed. The originally limited portfolio of available Se precursors such as H(2)Se and diethyl(di)selenide has recently been extended by bis(trialkylsilyl)selenides, bis(t...
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| Publicado no: | ACS Omega |
|---|---|
| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
American Chemical Society
2021
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| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7970478/ https://ncbi.nlm.nih.gov/pubmed/33748567 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/acsomega.1c00223 |
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