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Organoselenium Precursors for Atomic Layer Deposition
[Image: see text] Organoselenium compounds with perspective application as Se precursors for atomic layer deposition have been reviewed. The originally limited portfolio of available Se precursors such as H(2)Se and diethyl(di)selenide has recently been extended by bis(trialkylsilyl)selenides, bis(t...
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| 出版年: | ACS Omega |
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| 主要な著者: | , , , |
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
American Chemical Society
2021
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| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7970478/ https://ncbi.nlm.nih.gov/pubmed/33748567 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/acsomega.1c00223 |
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