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Expanding 3D Nanoprinting Performance by Blurring the Electron Beam

Additive, direct-write manufacturing via a focused electron beam has evolved into a reliable 3D nanoprinting technology in recent years. Aside from low demands on substrate materials and surface morphologies, this technology allows the fabrication of freestanding, 3D architectures with feature sizes...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Veröffentlicht in:Micromachines (Basel)
Hauptverfasser: Seewald, Lukas Matthias, Winkler, Robert, Kothleitner, Gerald, Plank, Harald
Format: Artigo
Sprache:Inglês
Veröffentlicht: MDPI 2021
Schlagworte:
Online Zugang:https://ncbi.nlm.nih.gov/pmc/articles/PMC7911092/
https://ncbi.nlm.nih.gov/pubmed/33499214
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12020115
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