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FEBID 3D-Nanoprinting at Low Substrate Temperatures: Pushing the Speed While Keeping the Quality

High-fidelity 3D printing of nanoscale objects is an increasing relevant but challenging task. Among the few fabrication techniques, focused electron beam induced deposition (FEBID) has demonstrated its high potential due to its direct-write character, nanoscale capabilities in 3D space and a very h...

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Dades bibliogràfiques
Publicat a:Nanomaterials (Basel)
Autors principals: Hinum-Wagner, Jakob, Kuhness, David, Kothleitner, Gerald, Winkler, Robert, Plank, Harald
Format: Artigo
Idioma:Inglês
Publicat: MDPI 2021
Matèries:
Accés en línia:https://ncbi.nlm.nih.gov/pmc/articles/PMC8229455/
https://ncbi.nlm.nih.gov/pubmed/34207654
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/nano11061527
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