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FEBID 3D-Nanoprinting at Low Substrate Temperatures: Pushing the Speed While Keeping the Quality

High-fidelity 3D printing of nanoscale objects is an increasing relevant but challenging task. Among the few fabrication techniques, focused electron beam induced deposition (FEBID) has demonstrated its high potential due to its direct-write character, nanoscale capabilities in 3D space and a very h...

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Dettagli Bibliografici
Pubblicato in:Nanomaterials (Basel)
Autori principali: Hinum-Wagner, Jakob, Kuhness, David, Kothleitner, Gerald, Winkler, Robert, Plank, Harald
Natura: Artigo
Lingua:Inglês
Pubblicazione: MDPI 2021
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Accesso online:https://ncbi.nlm.nih.gov/pmc/articles/PMC8229455/
https://ncbi.nlm.nih.gov/pubmed/34207654
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/nano11061527
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