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Hermeticity Analysis on SiC Cavity Structure for All-SiC Piezoresistive Pressure Sensor
The hermeticity performance of the cavity structure has an impact on the long-term stability of absolute pressure sensors for high temperature applications. In this paper, a bare silicon carbide (SiC) wafer was bonded to a patterned SiC substrate with shallow grooves based on a room temperature dire...
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| Publicado no: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2021
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7838917/ https://ncbi.nlm.nih.gov/pubmed/33430417 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s21020379 |
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