Cargando...
Hermeticity Analysis on SiC Cavity Structure for All-SiC Piezoresistive Pressure Sensor
The hermeticity performance of the cavity structure has an impact on the long-term stability of absolute pressure sensors for high temperature applications. In this paper, a bare silicon carbide (SiC) wafer was bonded to a patterned SiC substrate with shallow grooves based on a room temperature dire...
Gardado en:
| Publicado en: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
MDPI
2021
|
| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7838917/ https://ncbi.nlm.nih.gov/pubmed/33430417 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s21020379 |
| Tags: |
Engadir etiqueta
Sen Etiquetas, Sexa o primeiro en etiquetar este rexistro!
|