Φορτώνει......
Hermeticity Analysis on SiC Cavity Structure for All-SiC Piezoresistive Pressure Sensor
The hermeticity performance of the cavity structure has an impact on the long-term stability of absolute pressure sensors for high temperature applications. In this paper, a bare silicon carbide (SiC) wafer was bonded to a patterned SiC substrate with shallow grooves based on a room temperature dire...
Αποθηκεύτηκε σε:
| Τόπος έκδοσης: | Sensors (Basel) |
|---|---|
| Κύριοι συγγραφείς: | , , , , , |
| Μορφή: | Artigo |
| Γλώσσα: | Inglês |
| Έκδοση: |
MDPI
2021
|
| Θέματα: | |
| Διαθέσιμο Online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7838917/ https://ncbi.nlm.nih.gov/pubmed/33430417 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s21020379 |
| Ετικέτες: |
Προσθήκη ετικέτας
Δεν υπάρχουν, Καταχωρήστε ετικέτα πρώτοι!
|