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Fabrication of All-SiC Fiber-Optic Pressure Sensors for High-Temperature Applications
Single-crystal silicon carbide (SiC)-based pressure sensors can be used in harsh environments, as they exhibit stable mechanical and electrical properties at elevated temperatures. A fiber-optic pressure sensor with an all-SiC sensor head was fabricated and is herein proposed. SiC sensor diaphragms...
Wedi'i Gadw mewn:
| Prif Awduron: | , , , , |
|---|---|
| Fformat: | Artigo |
| Iaith: | Inglês |
| Cyhoeddwyd: |
MDPI AG
2016-10-01
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| Cyfres: | Sensors |
| Pynciau: | |
| Mynediad Ar-lein: | http://www.mdpi.com/1424-8220/16/10/1660 |
| Tagiau: |
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