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A Novel Tri-Axial Piezoelectric MEMS Accelerometer with Folded Beams
Microelectromechanical (MEMS) piezoelectric accelerometers are diversely used in consumer electronics and handheld devices due to their low power consumption as well as simple reading circuit and good dynamic performance. In this paper, a tri-axial piezoelectric accelerometer with folded beams is pr...
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| Published in: | Sensors (Basel) |
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| Main Authors: | , , , , , |
| Format: | Artigo |
| Language: | Inglês |
| Published: |
MDPI
2021
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| Subjects: | |
| Online Access: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7826644/ https://ncbi.nlm.nih.gov/pubmed/33440659 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s21020453 |
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