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A Novel Tri-Axial Piezoelectric MEMS Accelerometer with Folded Beams

Microelectromechanical (MEMS) piezoelectric accelerometers are diversely used in consumer electronics and handheld devices due to their low power consumption as well as simple reading circuit and good dynamic performance. In this paper, a tri-axial piezoelectric accelerometer with folded beams is pr...

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Detalles Bibliográficos
Publicado en:Sensors (Basel)
Main Authors: Liu, Yan, Hu, Bohao, Cai, Yao, Liu, Wenjuan, Tovstopyat, Alexander, Sun, Chengliang
Formato: Artigo
Idioma:Inglês
Publicado: MDPI 2021
Assuntos:
Acceso en liña:https://ncbi.nlm.nih.gov/pmc/articles/PMC7826644/
https://ncbi.nlm.nih.gov/pubmed/33440659
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s21020453
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