A vibrating beam MEMS accelerometer for gravity and seismic measurements

This paper introduces a differential vibrating beam MEMS accelerometer demonstrating excellent long-term stability for applications in gravimetry and seismology. The MEMS gravimeter module demonstrates an output Allan deviation of 9 μGal for a 1000 s integration time, a noise floor of 100 μGal/√Hz,...

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Bibliografske podrobnosti
izdano v:Sci Rep
Main Authors: Mustafazade, Arif, Pandit, Milind, Zhao, Chun, Sobreviela, Guillermo, Du, Zhijun, Steinmann, Philipp, Zou, Xudong, Howe, Roger T., Seshia, Ashwin A.
Format: Artigo
Jezik:Inglês
Izdano: Nature Publishing Group UK 2020
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Article
Online dostop:https://ncbi.nlm.nih.gov/pmc/articles/PMC7320019/
https://ncbi.nlm.nih.gov/pubmed/32591608
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-020-67046-x
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